Semiconductor Grade Crystalline Polysilicon Synthesis

A novel synthesis process technology is being developed for semiconductor grade crystalline polysilicon, which is not based on very harsh chemical reactions involving strong acids like fluoric acid and hydrochloric acid. This safer but highly efficient process is based on an initial catalytic conversion of silicon dioxide into an intermediate stable chemical species and the subsequent conversion of this intermediate species into highly pure silane via a controlled hydrogenation process step. The ensuing process step involves ultra-purification, crystallization and crystal growth in an optimized but strictly controlled process condition. Due to the IP-sensitive nature of this novel technology, the process details are not disclosed here.

The current sponsor of this project is Alberee R&D Company, Inc. in a joint force with CLFT1, LLC.

Polysilicon Pre-cursor Chemical Reaction R&D Unit (Front View)
Polysilicon Pre-cursor Chemical Reaction R&D Unit (Internal View)